Japan, Nov. 7 -- CANON INC has got intellectual property rights for 'IMPRINT DEVICE, IMPRINT METHOD, AND METHOD FOR MANUFACTURING ARTICLE.' Other related details are as follows:
Application Number: JP,2021-153347
Category (FI): H01L21/30,502@D
Stage: Grant (IP right document published.)
Filing Date: Sept. 21, 2021
Publication Date: April 3, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....