Japan, Feb. 18 -- TOKYO ELECTRON LTD has got intellectual property rights for 'HEATING DEVICE AND HEATING METHOD.' Other related details are as follows:
Application Number: JP,2022-094244
Category (FI): F26B3/04,H01L21/30,567,H10P76/00,567,H10P76/20
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 10, 2022
Publication Date: Jan. 24, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....