Japan, Jan. 28 -- TOKYO ELECTRON LTD has got intellectual property rights for 'HEAT TREATMENT DEVICE.' Other related details are as follows:
Application Number: JP,2022-001299
Category (FI): C23C16/46,H01L21/302,101@B,H01L21/302,101@G,H01L21/31@C,H05B3/06@B,H05B3/74,H10P14/60,101@C,H10P50/20,101@B,H10P50/20,101@G
Stage: Grant (IP right document published.)
Filing Date: Jan. 6, 2022
Publication Date: July 19, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....