Japan Intellectual Property Rights: HEAT TRANSFER MEMBER, METHOD FOR MANUFACTURING HEAT TRANSFER MEMBER, AND PLASMA PROCESSING DEVICE

Japan, March 24 -- MITSUBISHI MATERIALS CORP,MITSUBISHI CABLE IND LTD has got intellectual property rights for 'HEAT TRANSFER MEMBER, METHOD FOR MANUFACTURING HEAT TRANSFER MEMBER, AND PLASMA PROCESSING DEVICE.' Other related details are as follows:

Application Number: JP,2022-057297

Category (FI): H01L21/302,101@G,H05H1/46@M,H10P50/20,101@G

Stage: Grant (IP right document published.)

Filing Date: March 30, 2022

Publication Date: Oct. 13, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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