Japan Intellectual Property Rights: GRINDING METHOD OF WORKPIECE

Japan, Sept. 16 -- DISCO CORP has got intellectual property rights for 'GRINDING METHOD OF WORKPIECE.' Other related details are as follows:

Application Number: JP,2022-185547

Category (FI): B24B1/00@F,B24B19/02,H10P52/00@Q,H10P52/00@C,B24B7/04@A,H01L21/304,631

Stage: PROBLEM TO BE SOLVED: To reduce deterioration in the condition of a second grinding stone.SOLUTION: A grinding method of workpiece includes a first grinding step of grinding workpiece by a first grinding wheel having a plurality of first grinding stones, and a second grinding step of grinding the workpiece by a second grinding wheel having a plurality of second grinding stones having abrasive grains having the average particle diameter smaller than the average particle diam...