Japan Intellectual Property Rights: GAS SUPPLY AND EXHAUST STRUCTURE AND GAS SUPPLY AND EXHAUST METHOD FOR SUBSTRATE PROCESSING SYSTEM

Japan, Aug. 6 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'GAS SUPPLY AND EXHAUST STRUCTURE AND GAS SUPPLY AND EXHAUST METHOD FOR SUBSTRATE PROCESSING SYSTEM.' Other related details are as follows:

Application Number: JP,2022-208023

Category (FI): H01L21/304,648@G,H01L21/304,643@A,H01L21/304,648@L,H10P70/00,103@A,H10P70/00,108@G,H10P70/00,108@L

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Dec. 26, 2022

Publication Date: July 8, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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