Japan, Oct. 30 -- AIXTRON SE has got intellectual property rights for 'GAS INLET DEVICE FOR CVD REACTOR.' Other related details are as follows:
Application Number: JP,2024-045128
Category (FI): C23C16/455,H01L21/205
Stage: Grant (IP right document published.)
Filing Date: March 21, 2024
Publication Date: June 11, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....