Japan Intellectual Property Rights: FLAT HEAD UNITS FOR HEAVY LOAD ALIGNMENT

Japan, July 14 -- APPLIED MATERIALS INC has got intellectual property rights for 'FLAT HEAD UNITS FOR HEAVY LOAD ALIGNMENT.' Other related details are as follows:

Application Number: JP,2022-005423

Category (FI): G03F7/20,521,H10P72/70,H01L21/68@N

Stage: PROBLEM TO BE SOLVED: To provide electronic device fabrication, and more specifically, flat head units for heavy load alignment.SOLUTION: A mask frame support unit includes a case, a protruding body extending below the case, and a station having a flat head disposed above the case. The protruding body includes a tapered region and a cylindrical region. The tapered region includes a first end having a first diameter coupled to the case, and includes a second end having a second diameter o...