Japan, Oct. 29 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FILTER PERFORMANCE EVALUATION DEVICE, FILTER WETTING DEVICE, AND FILTER PERFORMANCE EVALUATION METHOD.' Other related details are as follows:
Application Number: JP,2021-166869
Category (FI): H01L21/304,648@F,B01D37/04
Stage: Grant(IP right document published.)
Filing Date: Oct. 11, 2021
Publication Date: April 21, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
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