Japan, Nov. 7 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FILM FORMING METHOD AND FILM FORMING APPARATUS.' Other related details are as follows:
Application Number: JP,2021-161577
Category (FI): H01L21/318@C,H01L21/31@C,C23C16/455
Stage: Grant (IP right document published.)
Filing Date: Sept. 30, 2021
Publication Date: April 11, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....