Japan, April 1 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FILM FORMATION METHOD AND FILM FORMATION DEVICE.' Other related details are as follows:
Application Number: JP,2022-186438
Category (FI): H10P14/692@X,H01L21/316@X,H01L21/31@C,C23C16/455,C23C16/56,H10P14/60,101@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 22, 2022
Publication Date: June 3, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....