Japan, June 22 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FILM DEPOSITION METHOD AND FILM DEPOSITION SYSTEM.' Other related details are as follows:
Application Number: JP,2022-020276
Category (FI): C23C14/14@E,C23C14/06@E
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 14, 2022
Publication Date: Aug. 24, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....