Japan, March 27 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS.' Other related details are as follows:
Application Number: JP,2022-015348
Category (FI): C01B32/184,C23C16/26,H01L21/205,H01L21/314@A,H10P14/24,H10P14/69@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 3, 2022
Publication Date: April 10, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....