Japan, April 22 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FILM DEPOSITION METHOD, AND FILM DEPOSITION APPARATUS.' Other related details are as follows:
Application Number: JP,2022-020187
Category (FI): C23C16/04,C23C16/455,C23C16/56,H01L21/31@C,H10P14/60,101@C,H10D64/62@R,H10P14/692@X,H01L21/316@X,H01L21/28,301@R
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 14, 2022
Publication Date: Aug. 24, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....