Japan, Sept. 18 -- CANON TOKKI CORP has got intellectual property rights for 'FILM DEPOSITION APPARATUS.' Other related details are as follows:
Application Number: JP,2024-192102
Category (FI): H10K71/16,H10K71/10,H10K71/00,H10K59/00,H10K59/10,H10K71/16,166,C23C14/24@G,C23C14/24@J
Stage: PROBLEM TO BE SOLVED: To provide a film deposition apparatus capable of improving film deposition accuracy.SOLUTION: A film deposition apparatus includes a magnet plate 11 provided inside a chamber, and generating magnetic force for attracting a mask to an adsorption plate, a plate unit lifting and lowering unit for lifting and lowering the magnet plate 11, and a connection mechanism 1100 for connecting the magnet plate 11 to the plate unit lifting and l...