Japan, Jan. 19 -- SHIBAURA MECHATRONICS CORP has got intellectual property rights for 'FILM DEPOSITION APPARATUS.' Other related details are as follows:
Application Number: JP,2021-161218
Category (FI): C23C14/34@J,C23C14/34@K,C23C14/50@K,H01L21/68@N,H01L23/00@C,H05K9/00@Q,H10P72/70,H10W42/20
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 30, 2021
Publication Date: April 11, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....