Japan, Oct. 30 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FILM DEPOSITION APPARATUS.' Other related details are as follows:
Application Number: JP,2021-130911
Category (FI): C23C16/44@J,H01L21/31@B
Stage: Grant (IP right document published.)
Filing Date: Aug. 10, 2021
Publication Date: Feb. 22, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....