Japan, Aug. 6 -- NIKON CORP has got intellectual property rights for 'EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD.' Other related details are as follows:
Application Number: JP,2025-004055
Category (FI): G03F7/20,521,G03F7/20,501
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 10, 2025
Publication Date: April 10, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....