Japan Intellectual Property Rights: EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING ARTICLE

Japan, July 14 -- CANON INC has got intellectual property rights for 'EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING ARTICLE.' Other related details are as follows:

Application Number: JP,2022-147948

Category (FI): G03F7/20,501,G03F7/20,521

Stage: PROBLEM TO BE SOLVED: To provide an exposure apparatus that improves throughput of an exposure processing of performing intermittent exposure.SOLUTION: An exposure apparatus has: a shutter which switches block and passing of light from a light source; a moving part which holds to move a substrate; and a control part which performs control so as to expose a first region in a first exposure period, interrupt exposure of the first region by making the illuminance of the light sou...