Japan, June 16 -- CANON INC has got intellectual property rights for 'EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING ARTICLE.' Other related details are as follows:
Application Number: JP,2022-085368
Category (FI): G03F7/20,521,G03F7/20,501
Stage: Grant (IP right granted following substantive examination.)
Filing Date: May 25, 2022
Publication Date: Dec. 7, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....