Japan, April 1 -- GIGAPHOTON INC has got intellectual property rights for 'EUV LIGHT GENERATION SYSTEM, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE.' Other related details are as follows:

Application Number: JP,2022-097474

Category (FI): G03F7/20,503,H05G2/00@K

Stage: Grant (IP right granted following substantive examination.)

Filing Date: June 16, 2022

Publication Date: Dec. 28, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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