Japan, Sept. 14 -- TOKYO ELECTRON LTD has got intellectual property rights for 'ETCHING METHOD AND PLASMA PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2023-046455
Category (FI): H10P50/20,105@A,H10P50/28,H01L21/302,105@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 23, 2023
Publication Date: Oct. 4, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....