Japan, Jan. 28 -- TOKYO ELECTRON LTD has got intellectual property rights for 'ETCHING METHOD AND PLASMA PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2024-211136
Category (FI): H01L21/302,105@A,H10P50/20,105@A,H10P50/24,H10P50/28
Stage: Grant (IP right document published.)
Filing Date: Dec. 4, 2024
Publication Date: March 5, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....