Japan, May 13 -- TOKYO ELECTRON LTD has got intellectual property rights for 'ETCHING METHOD AND ETCHING APPARATUS.' Other related details are as follows:

Application Number: JP,2023-038892

Category (FI): H10P50/28,H01L21/302,105@A,H01L21/302,201@A,H10P50/20,105@A,H10P50/20,201@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 13, 2023

Publication Date: Sept. 27, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....