Japan, March 26 -- ULVAC JAPAN LTD has got intellectual property rights for 'ETCHING METHOD AND ETCHING APPARATUS.' Other related details are as follows:

Application Number: JP,2024-070613

Category (FI): H01L21/302,101@D,H01L21/302,105@A,H10P50/20,101@D,H10P50/20,105@A,H10P50/28

Stage: Grant (IP right granted following substantive examination.)

Filing Date: April 24, 2024

Publication Date: Nov. 6, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....