Japan, July 1 -- TOKYO ELECTRON LTD has got intellectual property rights for 'EMBEDDING METHOD AND SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2022-037479
Category (FI): C23C16/56,H10P14/60,101@C,H01L21/31@C,H01L21/318@B,C23C16/42,H10P14/694@B,H10P14/692@X,H01L21/316@X
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 10, 2022
Publication Date: Sept. 22, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....