Japan, July 31 -- NGK SPARK PLUG CO LTD has got intellectual property rights for 'ELECTROSTATIC CHUCK.' Other related details are as follows:
Application Number: JP,2023-044419
Category (FI): H01L21/68@R,H10P72/72,H10P50/20,101@G,H01L21/302,101@G,C23C16/458
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 20, 2023
Publication Date: Oct. 3, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....