Japan, Feb. 12 -- TOTO LTD has got intellectual property rights for 'ELECTROSTATIC CHUCK.' Other related details are as follows:
Application Number: JP,2024-029026
Category (FI): H10P72/72,H01L21/68@R
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 28, 2024
Publication Date: Sept. 9, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....