Japan, Oct. 30 -- HORIBA STEC CO LTD has got intellectual property rights for 'ELECTROSTATIC CHUCK DEVICE.' Other related details are as follows:
Application Number: JP,2020-202883
Category (FI): H01L21/68@R,H02N13/00@D,H01L21/205,H01L21/302,101@G
Stage: Grant (IP right document published.)
Filing Date: Dec. 7, 2020
Publication Date: June 17, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....