Japan, July 27 -- SUMITOMO OSAKA CEMENT CO LTD has got intellectual property rights for 'ELECTROSTATIC CHUCK DEVICE AND METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK DEVICE.' Other related details are as follows:
Application Number: JP,2022-083758
Category (FI): H01L21/302,101@G,H10P72/72,H01L21/68@R,C23C16/458,H10P50/20,101@G,C23C14/50@A,H02N13/00@D
Stage: Grant (IP right granted following substantive examination.)
Filing Date: May 23, 2022
Publication Date: Dec. 6, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....