Japan, March 6 -- ULVAC JAPAN LTD has got intellectual property rights for 'ELECTROSTATIC CHUCK AND MANUFACTURING METHOD OF THE SAME.' Other related details are as follows:
Application Number: JP,2022-069906
Category (FI): H01L21/68@R,H02N13/00@D,H10P72/72
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 21, 2022
Publication Date: Nov. 2, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....