Japan, July 27 -- TOKYO ELECTRON LTD has got intellectual property rights for 'ELECTROSTATIC CHUCK, SUBSTRATE SUPPORT ASSEMBLY, AND PLASMA PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2022-076006
Category (FI): H10P72/72,H02N13/00@D,H01L21/68@R
Stage: Grant (IP right granted following substantive examination.)
Filing Date: May 2, 2022
Publication Date: Nov. 15, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....