Japan, Nov. 10 -- IMS NANOFABRICATION GMBH has got intellectual property rights for 'ELECTROMAGNETIC LENS AND CHARGED-PARTICLE OPTICAL APPARATUS.' Other related details are as follows:
Application Number: JP,2022-110238
Category (FI): H01L21/30,541@B,H01J37/145,H01J37/143,H10P76/00,541@B,H01J37/305@B
Stage: Grant (IP right document published.)
Filing Date: July 8, 2022
Publication Date: Jan. 26, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....