Japan, Jan. 28 -- SINFONIA TECHNOLOGY CO LTD has got intellectual property rights for 'EFEM.' Other related details are as follows:
Application Number: JP,2021-076629
Category (FI): H01L21/68@A,H10P72/30@A
Stage: Grant (IP right document published.)
Filing Date: April 28, 2021
Publication Date: Nov. 10, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....