Japan Intellectual Property Rights: DYNAMIC INTERFACE FOR PROVIDING SYMMETRIC RADIO FREQUENCY RETURN PATH

Japan, Sept. 16 -- APPLIED MATERIALS INC has got intellectual property rights for 'DYNAMIC INTERFACE FOR PROVIDING SYMMETRIC RADIO FREQUENCY RETURN PATH.' Other related details are as follows:

Application Number: JP,2025-129825

Category (FI): H10P95/00,201@Z,H01L21/68@N,H10P72/70,H01L21/02@Z

Stage: PROBLEM TO BE SOLVED: To provide a substrate processing system and processing method to be used for efficiently managing a substrate in a cluster tool environment.SOLUTION: A processing chamber system 700 includes: a liner 715 positioned atop a chamber body 705, the liner including first quick disconnect members 770d; and a substrate support 725 disposed within the chamber body, the substrate support including a support plate 730 including a h...