Japan, June 10 -- ENTEGRIS INC has got intellectual property rights for 'DRUG-RESISTANT MULTILAYER COATING APPLIED BY ATOMIC LAYER DEPOSITION.' Other related details are as follows:
Application Number: JP,2022-129540
Category (FI): H10P50/20,101@G,C23C16/40,H01L21/302,101@G,H01L21/31@C,H10P14/60,101@C
Stage: Grant (IP right document published.)
Filing Date: Aug. 16, 2022
Publication Date: Dec. 6, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....