Japan, Jan. 28 -- HITACHI HIGH-TECH CORP has got intellectual property rights for 'DIAGNOSTIC DEVICE, SEMICONDUCTOR MANUFACTURING DEVICE SYSTEM, SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM, AND DIAGNOSTIC METHOD.' Other related details are as follows:
Application Number: JP,2024-062447
Category (FI): G01N25/18@A,H01L21/205,H01L21/302,101@G,H01L21/302,103,H01L21/68@R,H10P14/24,H10P50/20,101@G,H10P50/20,103,H10P72/72
Stage: Grant (IP right document published.)
Filing Date: April 9, 2024
Publication Date: July 2, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....