Japan, Oct. 30 -- TOKYO ELECTRON LTD has got intellectual property rights for 'DEVICE FOR PERFORMING FILM DEPOSITION PROCESS ON SUBSTRATE AND METHOD FOR PERFORMING FILM DEPOSITION PROCESS ON SUBSTRATE.' Other related details are as follows:
Application Number: JP,2021-137435
Category (FI): C23C16/455,H01L21/31@C,H01L21/316@X,H01L21/318@B
Stage: Grant (IP right document published.)
Filing Date: Aug. 25, 2021
Publication Date: March 9, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....