Japan, Oct. 30 -- APPLIED MATERIALS INC has got intellectual property rights for 'DEVICE FOR MEASURING EDGE RING DISTANCE OF HEAT TREATMENT CHAMBER, SYSTEM, AND METHOD.' Other related details are as follows:
Application Number: JP,2024-140615
Category (FI): H01L21/26@T
Stage: Grant (IP right document published.)
Filing Date: Aug. 22, 2024
Publication Date: Dec. 24, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....