Japan, Aug. 31 -- CANON INC has got intellectual property rights for 'DETECTOR, LITHOGRAPHY DEVICE, AND ARTICLE MANUFACTURING METHOD.' Other related details are as follows:
Application Number: JP,2022-133518
Category (FI): B29C59/02@Z,G01B11/14@G,H01L21/30,502@D,H10P76/00,600
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 24, 2022
Publication Date: March 7, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....