Japan, Aug. 31 -- TOKYO ELECTRON LTD has got intellectual property rights for 'DEPOSITION METHOD AND DEPOSITION DEVICE.' Other related details are as follows:
Application Number: JP,2022-179837
Category (FI): H01L21/316@X,H10P14/694@B,H01L21/318@B,H10P14/60,101@C,H10P14/692@X,H01L21/31@C,C23C16/509
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 9, 2022
Publication Date: May 21, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....