Japan, July 27 -- TOKYO ELECTRON LTD has got intellectual property rights for 'DEPOSITION DEVICE.' Other related details are as follows:
Application Number: JP,2022-205689
Category (FI): C23C16/458,H10P14/60,101@C,H01L21/31@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 22, 2022
Publication Date: July 4, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....