Japan, June 10 -- UNITED SEMICONDUCTOR JAPAN CO LTD has got intellectual property rights for 'DEPOSITION APPARATUS MASK STRUCTURE, DEPOSITION APPARATUS AND METHOD FOR OPERATING THE SAME.' Other related details are as follows:
Application Number: JP,2021-136851
Category (FI): C23C14/04@A,H10P72/70,C23C14/56@G,H01L21/68@N
Stage: Grant (IP right document published.)
Filing Date: Aug. 25, 2021
Publication Date: March 30, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....