Japan, Sept. 14 -- DNF CO LTD has got intellectual property rights for 'CYCLOSILAZANE COMPOUND AND METHOD OF PRODUCING SILICON-CONTAINING THIN FILM USING THE SAME.' Other related details are as follows:
Application Number: JP,2025-040932
Category (FI): H01L21/316@X,H10P14/694@B,H10P14/692@X,C23C16/42,C07F7/12@W,H01L21/318@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 14, 2025
Publication Date: Sept. 29, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....