Japan, Aug. 12 -- DISCO CORP has got intellectual property rights for 'CORRECTION METHOD FOR CHUCK TABLE.' Other related details are as follows:
Application Number: JP,2022-139895
Category (FI): H01L21/78@N,B24B41/06@L,H10P58/00@N,B24B7/04@Z,B24B27/06@M
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 2, 2022
Publication Date: March 14, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....