Japan, Nov. 10 -- TOKYO ELECTRON LTD has got intellectual property rights for 'CONVEYING METHOD OF OBJECT TO BE PROCESSED AND PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2021-172990

Category (FI): H10P50/20,101@G,H01L21/68@N,H01L21/205,H01L21/31@C,H01L21/302,101@G,C23C16/44@F,C23C16/458,H10P14/24,H10P14/60,101@C,H10P72/70

Stage: Grant (IP right document published.)

Filing Date: Oct. 22, 2021

Publication Date: May 9, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....