Japan, Oct. 30 -- TOKYO ELECTRON LTD has got intellectual property rights for 'CONTROL METHOD AND CONTROL DEVICE.' Other related details are as follows:
Application Number: JP,2021-095287
Category (FI): C23C16/52,C23C16/46
Stage: Grant (IP right document published.)
Filing Date: June 7, 2021
Publication Date: Dec. 19, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....