Japan Intellectual Property Rights: CONDITIONING METHOD OF POLISHING TOOL, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE PROCESSING DEVICE

Japan, March 26 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'CONDITIONING METHOD OF POLISHING TOOL, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:

Application Number: JP,2023-011058

Category (FI): B24B41/06@A,B24B53/02,B24B53/095,B24B53/12@A,B24B7/04@A,H01L21/304,621@D,H01L21/304,622@M,H01L21/304,644@Z,H01L21/304,647@Z,H10P52/00@E,H10P52/00@Q,H10P70/00,104@Z,H10P70/00,107@Z

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Jan. 27, 2023

Publication Date: Aug. 8, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....