Japan, Jan. 28 -- SHIN ETSU CHEM CO LTD has got intellectual property rights for 'COMPOSITION FOR FORMING METAL OXIDE FILM, METHOD FOR FORMING PATTERN, AND METHOD FOR FORMING METAL OXIDE FILM.' Other related details are as follows:
Application Number: JP,2023-061140
Category (FI): G03F7/11,502,G03F7/11,503,H01L21/314@A,H10P14/69@A,C09D7/65,C09D1/00,G03F7/26,511,C09D7/63
Stage: Grant (IP right document published.)
Filing Date: April 5, 2023
Publication Date: Nov. 22, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....