Japan, April 1 -- DISCO ABRASIVE SYST LTD has got intellectual property rights for 'CMP POLISHING DEVICE.' Other related details are as follows:
Application Number: JP,2022-091518
Category (FI): H10P52/40,H10P52/00@J,B24B37/10,H01L21/304,622@E,B24B37/00@K
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 6, 2022
Publication Date: Dec. 18, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....